Characteristics of concern for both microactuator and microsensor technology are repeatability, the
ability to fabricate at a small scale, immunity to extraneous influences, sufficient bandwidth, and if
possible, linearity. Characteristics typically of concern specifically for microactuators are achievable force,
displacement, power, bandwidth (or speed of response), and efficiency. Characteristics typically of concern
specifically for microsensors are high resolution and the absence of drift and hysteresis.
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