The most widely utilized multicomponent microactuators are those based upon electrostatic transduction.
These actuators can also be regarded as a variable capacitance type, since they operate in an
analogous mode to variable reluctance type electromagnetic actuators (e.g., variable reluctance stepper
motors). Electrostatic actuators have been developed in both linear and rotary forms. The two most
common configurations of the linear type of electrostatic actuators are the normal-drive and tangential
or comb-drive types, which are illustrated in Figs. respectively. Note that both actuators are
suspended by flexures, and thus the output force is equal to the electrostatic actuation force minus the
elastic force required to deflect the flexure suspension. The normal-drive type of electrostatic microactuator
operates in a similar fashion to a condenser microphone.
No comments:
Post a Comment